| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66575 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3141 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2008-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2defe858348114c81feb2c322062d3e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8092696aa6c3b1f644d001f03cce9edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdb53411be077c962f362218e0870ce0 |
| publicationDate |
2010-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100078285-A |
| titleOfInvention |
Composite thin film formation method |
| abstract |
In a method for forming a composite thin film that can be used for manufacturing a semiconductor device, a first precursor including a first center element and a ligand bound to the first center element is adsorbed to a first adsorption site on the object. The ligand or first central element of the adsorbed first precursor is removed to form a second adsorption site. The second precursor is adsorbed on the second adsorption site to form a composite thin film on the object. Since the generation rate of the adsorption site on the object can be effectively controlled, the composite thin film having the desired composition ratio can be easily formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220012632-A |
| priorityDate |
2008-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |