Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31662 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
filingDate |
2007-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92aca6788fe723ec21c500d54aa7aadf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00508927b2b4c71dea8efef775b4cc1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbc31b1a4657ff9291d78ebe9ccaa5f4 |
publicationDate |
2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20090100421-A |
titleOfInvention |
Low energy and safe handling of large amounts of arsenic, phosphorus, and boron implanted wafers |
abstract |
A method of preventing the formation of toxic gases after the injection process is disclosed. When injected into a film disposed on a substrate, certain dopants may react to form toxic and / or combustible gases when exposed to moisture. By in-situ exposure of the film doped with the oxygen containing compound, the dopant shallowly injected into the layer stack reacts to form the dopant oxide, thereby reducing potential toxic and / or flammable gas formation. . Alternatively the capping layer can be formed in situ over the injected film thereby reducing the potential generation of toxic and / or combustible gases. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140012727-A |
priorityDate |
2006-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |