http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090050971-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
filingDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_883a7089c3ba89b65268c3dcb8e392af |
publicationDate | 2009-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20090050971-A |
titleOfInvention | Thin film field effect transistor and display device using same |
abstract | A thin film field effect transistor having at least a gate electrode, a gate insulating film, an active layer containing an amorphous oxide semiconductor, a source electrode and a drain electrode on a substrate, wherein an average square roughness of an interface between the gate insulating film and the active layer is less than 2 nm. And the carrier concentration of the active layer is 1 × 10 15 / cm 3 or more, and the film thickness of the active layer is 0.5 nm or more and less than 20 nm.n n n A TFT having high field effect mobility, high ON / OFF ratio, and improved environmental temperature dependency is provided.n n n n Thin film field effect transistor, active layer, carrier concentration, field effect mobility |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9917109-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9537012-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101254910-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9130041-B2 |
priorityDate | 2007-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 213.