http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090040589-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2007-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27350e542b89ac13d0058aa6491fb90c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef00e44ed888f8263efef38a83d48542 |
| publicationDate | 2009-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090040589-A |
| titleOfInvention | Plasma Electrode, Plasma Monitoring Module, Plasma Apparatus and Atmospheric Pressure Plasma Cleaner |
| abstract | The present invention relates to a plasma electrode, a plasma monitoring module, a plasma apparatus having the same, and an atmospheric pressure plasma cleaning apparatus, comprising: an electrode body having an electrical reaction area capable of generating plasma; Discharge holes penetrated or recessed on the electrode body so as to communicate with a space in which plasma is generated by the power applied to the electrode body; And a plasma connecting member formed of a conductor and fixedly installed on the electrode body so that the plasma gas introduced into the discharge hole contacts the surface, and insulated from the electrode body. In order to achieve continuous performance detection throughout the process of generating and spraying plasma, it is possible to sensitively detect the plasma discharge performance of the plasma generating device itself, which generates plasma, The present invention relates to a plasma electrode, a plasma monitoring module, a plasma apparatus having the same, and an atmospheric pressure plasma cleaning apparatus capable of preventing the measurement accuracy from being lowered under the influence of the elements. |
| priorityDate | 2007-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.