| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73d55b44219a84c850812a4488def924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2007-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa18f15721a7264643a7e3fc1082ba5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522ead648ddc3bc8e9e4bf1e596fc3eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_476a0f4ee46e729d26be02a581ef3c74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1501a52518c378a5ca6ea75cf09b632f |
| publicationDate |
2008-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080102273-A |
| titleOfInvention |
Plasma oxidation treatment method |
| abstract |
Within the treatment chamber of a plasma processing apparatus, using the processing gas containing oxygen and, O (1 D 2) the density of the radical 1 × 10 12 [㎝ -3] plasma treatment to oxidize the surface of the object to be processed by using a plasma or more To form a silicon oxide film. Between the plasma oxidation treatment, by the VUV monochrometer (63) by measuring the density of O (1 D 2) radicals in the plasma to compensate for the plasma processing condition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101380094-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190132085-A |
| priorityDate |
2006-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |