| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0218 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2001-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbd95b2e5dafc3a3e3c16efb60be6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee1ac460c125b7c08f5a5f7c22a6d517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3969644e6cd4342f1315cdcb99818cb5 |
| publicationDate |
2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080068941-A |
| titleOfInvention |
Carbonitride coating parts of semiconductor processing equipment and manufacturing method thereof |
| abstract |
Provided are a corrosion protection component including a carbonitride containing surface in a semiconductor processing equipment such as a plasma chamber and a method of manufacturing the same. |
| priorityDate |
2000-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |