http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070095210-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2007-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b49110e6d3e24d5633defa3b01cd29df |
| publicationDate | 2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070095210-A |
| titleOfInvention | Plasma processing apparatus and plasma processing method |
| abstract | To improve the durability of the parts, members and parts exposed to the plasma atmosphere in the chamber used for plasma etching in the corrosive gas atmosphere, and the plasma erosion resistance of the film formed on the surface of the member in the corrosive gas atmosphere. The present invention proposes a plasma processing apparatus and a plasma processing method using the same, which can prevent the generation of particles of corrosion products even under high plasma output. Processed by plasma In the plasma processing apparatus, the surface exposed to the plasma generating atmosphere of the chamber, the surface of the arrangement member or component in the chamber is formed of at least a porous layer made of a metal oxide and the metal oxide formed on the porous layer. By secondary recrystallization layer It is covered. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110005661-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140051280-A |
| priorityDate | 2006-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.