| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44D2203-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63H3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A42B1-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A42B1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2006-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e18570aa6a2e55819b509cf246ee99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_408f1dc0e04ab4efb4d37325c937b69c |
| publicationDate |
2006-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060086893-A |
| titleOfInvention |
Deposition device |
| abstract |
The cleaning method of the film-forming apparatus which concerns on this invention WHEREIN: The cleaning method for removing the titanium chloride adhered in the chamber for giving predetermined film-forming process to an object, WHEREIN: At least the site | part to be cleaned in a chamber is heated to 130 degreeC or more, By introducing a fluorine compound gas into the chamber as a cleaning gas in a state where the cleaning target site is set to 130 ° C or higher, at least the titanium chloride attached to the cleaning target site is converted into titanium fluoride, and the titanium fluoride is exhausted from the chamber. do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100761757-B1 |
| priorityDate |
1997-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |