| abstract |
The present invention provides a probe of a scanning probe microscope in which a planar field effect transistor is fabricated and a carbon nanotube of a conductor is formed thereon, whereby a sharp tip is formed and electrical properties are also increased. A first step of manufacturing the effect transistor; A second step of preparing to grow carbon nanotubes on an upper end of the gate electrode of the field effect transistor; And generating a carbon nanotube at an upper end of the gate electrode of the prepared field effect transistor. It provides a method for producing a probe having a field effect transistor channel structure comprising a.n n n n Field Effect Transistors, Carbon Nanotubes, Scanning Probe Microscopes (SPM), Probes, Gate Electrodes, Seed Electrodes |