| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e967c981e5adc9af89897347f1e8cde3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32813df161eb487df8828b1adb2702f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d36a8d58938a2b8a14e98087b8f396f8 |
| publicationDate |
2006-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060048011-A |
| titleOfInvention |
Coating Compositions for Use with Top-Coated Photoresist |
| abstract |
Provided are compositions (especially antireflective coating compositions or "ARCs") that can reduce / reduce reflection of exposure radiation from the substrate back to the top coated photoresist layer and / or act as a planarization or via-fill layer. More specifically, the present invention relates to antireflective coating compositions containing polyester resin components comprising repeating units containing phenolic and / or hydroxyalkylcyanurate groups. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011031123-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011031123-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101536798-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110028763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160082470-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102725695-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102725695-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9063424-B2 |
| priorityDate |
2004-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |