http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20060032134-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-2509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0329 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2004-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bee03d2fefe9e7bcde194c751bb5686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce563229434f6786156723ae6d3edc69 |
| publicationDate | 2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20060032134-A |
| titleOfInvention | In-situ gas mixing and dilution system to deliver diluent gas at a predetermined concentration |
| abstract | The present invention relates to an apparatus and a method for delivering a dilute active gas to, for example, a downstream active gas-consuming processing device of a semiconductor manufacturing plant. The delivery system includes an active fluid source, a dilution fluid source, a fluid flow rate measuring device for dispensing active fluid at a predetermined flow rate, the fluid dispensed at the predetermined flow rate by the fluid flow measuring device to form a diluted active fluid mixture. In order to control the dispensing rate of the active fluid and the mixing device arranged to mix the active gas from the active fluid source with the dilution fluid, the concentration of the active fluid in the diluted active fluid mixture is measured and in response to the fluid flow rate A monitor arranged to control the measurement device and to maintain a predetermined concentration of the active fluid in the diluted active fluid mixture.n n n n Doping, diluted active gas, diluted active fluid |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9666435-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101241922-B1 |
| priorityDate | 2003-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.