| abstract |
The present invention provides a mixture of the active fluid source 12, the diluent fluid source 14, the fluid flow measuring device 24 for dispensing one of the active fluid and the diluent fluid, and the active fluid and the diluent fluid, which are diluted. A mixer 28 arranged to form an active fluid mixture, and sensing and responding to the concentration of the active and / or diluent fluid in the diluted active fluid mixture to obtain a predetermined concentration of the active fluid in the diluted active fluid mixture Thereby providing a dilution fluid delivery system 10 using a monitor 42 arranged to adjust the fluid flow measurement device 24. Pressure control 38 is arranged to control the flow of the other of the active fluid and the diluent fluid to maintain a predetermined pressure of the diluted active fluid mixture dispensed from the system. The fluid dispensed from the system may be controllably controlled by a flow rate controller, for example a mass flow rate controller, to provide a predetermined flow rate to a fluid use unit such as a semiconductor processing mechanism. An end point monitoring assembly is also provided for switching the fluid sources 12, 15 to maintain the delivery persistence of the diluted active fluid mixture. n n Active fluid, diluent fluid, mixer, monitor, concentration, pressure control, flow control, dilution active fluid mixture |