http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050067529-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2003-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65dd1465529947b50a61f4f8b3e46fd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_495b95e39a31bfc45c057da5c4afae44 |
| publicationDate | 2005-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050067529-A |
| titleOfInvention | Method for preparation of multi-component thin film |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a multicomponent thin film, and more particularly, to a method of forming a thin film using a mixed material having a different composition as a precursor in a chemical vapor deposition method or an atomic layer deposition method. Method for producing a multi-component thin film according to the present invention comprises the steps of preparing a reference mixed raw material comprising each component element constituting the thin film in a predetermined composition ratio; 1A mixed raw material and 1B mixed raw material comprising the composition ratio of the component element to control the composition of each component element of the reference mixed raw material exceeds and falls below a predetermined ratio based on the composition ratio of the component element included in the standard mixed raw material Manufacturing step; And depositing a multicomponent thin film using one or both of the 1A mixed raw material and the 1B mixed raw material simultaneously with the reference mixed raw material. According to the present invention, fine control of the evaporator thin film composition of the multi-component thin film is possible, and process reproducibility is secured, thereby improving productivity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8361551-B2 |
| priorityDate | 2003-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.