| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12736 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C21-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-2336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-129 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C21-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2003-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040096621-A |
| titleOfInvention |
Plasma-resistant, welded aluminum structures for use in semiconductor processing apparatus |
| abstract |
A method of making a composite aluminum alloy article has been found, in which welding is used to form the article, anodized aluminum coating is created on the surface of the article including the weld, and the anodized aluminum coating is uniform. And improved performance over the known art for welded articles exposed to corrosive plasma environments. |
| priorityDate |
2002-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |