| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a492183be65153abfa7dec00d51c816 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bc54f91681f57a3cf9589ddc89075de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63c7f571e7bebcccf8f5eec2d2e5b06d |
| publicationDate |
2002-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020054907-A |
| titleOfInvention |
Plasma deposition apparatus and method for forming deposition layer using it |
| abstract |
The present invention discloses a plasma deposition apparatus and a deposition film forming method using the same. The present invention disclosed is a reactor including a heater block and a gas exhaust port on which a silicon wafer is mounted, a diffuser formed in an upper portion of the reactor and connected to a high frequency generator and a filter from ground, respectively, and connected to the diffuser. A plasma deposition apparatus comprising a gas injection tube for injecting a reaction gas from the outside of a reactor, the apparatus comprising a power supply connected to the heater block and emitting an electric field having a vertical component in the thickness direction of the silicon wafer. do. Thereby, the vapor deposition film which has a uniform profile can be formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100834612-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107557751-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200064232-A |
| priorityDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |