http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020027567-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020027567-A |
| titleOfInvention | Method of etching |
| abstract | An object of the present invention is to provide an etching method capable of preventing micro trenching without using an etching stopper. The present invention provides a method for etching an organic film layer formed on a wafer (W) disposed in a processing chamber by introducing a processing gas into an airtight processing chamber, wherein the processing gas includes N 2 and H 2 , and the internal pressure of the vacuum processing chamber is substantially It is characterized in that the 500mTorr to 800mTorr. If at least a nitrogen atom-containing gas and a hydrogen atom-containing gas are included in the processing gas and the pressure inside the vacuum processing chamber is substantially 500 mTorr or more, micro trenching can be prevented without using an etching stopper. In addition, the mask selectivity can be increased. |
| priorityDate | 1999-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451 |
Total number of triples: 21.