| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-38 |
| filingDate |
2001-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baf5c36cb231f7c4d0830e513cd4bf21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a88eea617dc88b91083039d59475c32c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35cf02cbf342247615b2d5209b638f16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ba24a8bf9bb05516d8ec587765c2c6d |
| publicationDate |
2002-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020019422-A |
| titleOfInvention |
ECHING AGENT FOR Ti-BASED FILM AND METHOD OF ECHING BY USE OF SAME |
| abstract |
An object of the present invention is to provide a method for etching a Ti-based film and an etchant used for etching a Ti-based film. This object is an etching method characterized by etching a Ti-based film on a semiconductor substrate using a solution containing hydrogen peroxide and a chelating agent, and an etchant for a Ti-based film on a semiconductor substrate composed of a solution containing hydrogen peroxide and a chelating agent. Is achieved by. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140065771-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108291314-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108291314-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101695571-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8395270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017086758-A1 |
| priorityDate |
2000-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |