| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_204c32335084dc79a4ea6315443b7279 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2001-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63fdeb2c68c6a7510917ae1a3c0c9fb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bef13ffc20c2649f86d3d37c7ad4999e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3856e770765a49810824c1ea1eea2aa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a643286f3d40b2d563192d7e0878fab |
| publicationDate |
2002-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020011071-A |
| titleOfInvention |
Plasma generating apparatus |
| abstract |
One discharge tube assembled from the three divided parts is made of metal material in a state in which the discharge gap and the insulator for forming a vacuum seal are hermetically sealed with an O-ring, and interposed between the connecting flanges of both discharge tube elements. By connecting between the first discharge tube element and the second metallic discharge tube element and also by connecting the first metallic discharge tube element and the third metallic discharge tube element in a similar manner, wherein a discharge gap is formed between adjacent discharge tube elements. do. A high frequency power source is connected to each discharge tube element. Each discharge tube element is provided with a refrigerant passage separately from each other. |
| priorityDate |
2000-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |