http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010112271-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2000-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010112271-A |
| titleOfInvention | Iridium etching methods for anisotrophic profile |
| abstract | A method of etching an electrode layer disposed on a substrate to produce a semiconductor device comprising a plurality of electrodes separated at intervals of about 0.3 μm or less and having a profile of about 85 ° or more. The method comprises heating a substrate to a temperature of about 150 ° C. or higher and a high density inductively coupled plasma of an etching gas comprising oxygen and / or chlorine, argon and a gas selected from the group consisting of BCl 3 , HBr, HCl and mixtures thereof. And etching the electrode layer. The semiconductor device includes a substrate and a plurality of electrodes supported by the substrate. The electrodes have a size (eg, width) of about 0.3 μm or less and a profile of about 85 ° or more. |
| priorityDate | 1999-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.