http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010067378-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2000-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cb048b86304949d908d7c33ed66073c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011a1a34e0710f341a81c9dd1d273ea7 |
| publicationDate | 2001-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010067378-A |
| titleOfInvention | Positive photoresist composition |
| abstract | A positive photoresist composition comprising an acid-decomposable polysiloxane containing a repeating structural unit represented by general formula (I).n n n n n n n n L represents at least one divalent linking group selected from -A-NHCO-, -A-NHCOO-, -A-NHCONH-. A represents a single bond, an alkylene group, or an arylene group. X represents a single bond or a divalent linking group.n n n Z isn n n One of the groups represented by.n n n Y represents a hydrogen atom, or Y represents an alkyl group, an aryl group, or an aralkyl group. The atom group represented by Y may be linear, branched, or cyclic. R represents a hydrogen atom. Or R represents a group that decomposes in the acid. l represents the integer of 1-3, m also represents the integer of 1-3. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100493855-B1 |
| priorityDate | 1999-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 247.