| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87571 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K31-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate |
2000-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f3c7f6c1d1e7355c33f019c21c0a0c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04af4f251a15d4a5c2b78275fb9ccc59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2cab58de2dceb7cc346f7794587b6ef |
| publicationDate |
2001-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20010030282-A |
| titleOfInvention |
Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material |
| abstract |
The present invention provides a vaporizer capable of efficiently vaporizing a liquid raw material under a reduced pressure atmosphere. The liquid raw material is temporarily stored in the liquid storage chamber, and is supplied to the vaporization chamber set at a reduced pressure atmosphere through the micropores. The inlet of the liquid reservoir is opened and closed by a valve body, which is operated by an actuator that controls the valve opening of the valve body. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101432243-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210125971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100709035-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8783652-B2 |
| priorityDate |
1999-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |