http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990050935-A

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4983
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4941
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
filingDate 1997-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1999-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-19990050935-A
titleOfInvention Semiconductor device and manufacturing method thereof
abstract BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device having a gate electrode having a polyside structure, and a method of manufacturing the same. In the gate electrode according to the present invention, a polysilicon layer, a barrier metal layer, and a metal silicide layer are sequentially stacked, and the barrier metal layer is It surrounds the lower side and both side walls of the metal silicide pattern.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100380282-B1
priorityDate 1997-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730

Total number of triples: 26.