http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102460463-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102460463-B1 |
| titleOfInvention | Image Tone Reversal by Dielectric Using Bottom-Up Crosslinking for Back End of Line (BEOL) Interconnects |
| abstract | Image tone inversion by dielectrics using bottom-up crosslinking for back end of line (BEOL) interconnects is described. In an example, a semiconductor structure including a metallization layer includes a plurality of trenches in an interlayer dielectric (ILD) layer over a substrate. The procatalyst layer is on sidewalls of one or more (but not all) of the plurality of trenches. Cross-linked portions of the dielectric material proximate the procatalyst layer in at least one of the plurality of trenches. Conductive structures are in the rest of the trenches. |
| priorityDate | 2015-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.