| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2018-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102433698-B1 |
| titleOfInvention |
A method used to form at least a portion of at least one conductive capacitor electrode of a capacitor comprising a pair of conductive capacitor electrodes having a capacitor insulator therebetween, and a method of forming a capacitor. |
| abstract |
A method used to form at least a portion of at least one conductive capacitor electrode of a capacitor comprising a pair of conductive capacitor electrodes having a capacitor insulator therebetween includes forming an insulative first material comprising an amorphous insulative metal oxide. . The amorphous insulating metal oxide is reduced in a reducing atmosphere to form a second conductive material from the insulating first material. Such reduction in the reducing atmosphere (a) removes oxygen from the metal oxide and changes the stoichiometry of the metal oxide, and (b) crystallizes the metal oxide to a conductive crystalline state. |
| priorityDate |
2017-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |