| abstract |
A coating liquid for forming an oxide or oxynitride insulator film is provided, the coating liquid comprising: element A; at least one selected from the group consisting of element B and element C; and a solvent, wherein element A is at least one selected from the group consisting of Sc, Y, Ln (lanthanoids), Sb, Bi and Te, and element B is selected from the group consisting of Ga, Ti, Zr and Hf. At least one selected from the group consisting of elements C is at least one selected from the group consisting of Group 2 elements of the periodic table, and the solvent includes at least one selected from the group consisting of an organic solvent having a flash point of 21 °C or higher and less than 200 °C, and water. do. |