| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268a60dde7719a410b321866a3b7c08f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-124 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2020-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9279183d9686bfe5adae5a031637caa8 |
| publicationDate |
2021-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102252677-B1 |
| titleOfInvention |
A composition of anti-reflective hardmask |
| abstract |
The present invention provides an antireflection hardmask composition comprising (a) a copolymer comprising bisindole compounds represented by the following formula (1) or a copolymer blend comprising the same, and (b) an organic solvent. [Formula 1] |
| priorityDate |
2020-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |