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filingDate 2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b07c820d82a855b6cbc33bda7b292d5
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publicationDate 2020-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102101275-B1
titleOfInvention Novel polymer and resist underlayer film composition containing the same
abstract The present invention is a core material of a resist underlayer film composition used in a semiconductor and display manufacturing process having excellent etching resistance, thermal stability, surface planarity, gap fill characteristics, and mechanical properties of a pattern, and a resist underlayer film containing the same It relates to a composition.
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