http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102250496-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102250496-B1 |
| titleOfInvention | Controlling ion energy within a plasma chamber |
| abstract | Systems and methods for controlling ion energy in a plasma chamber are described. One of these systems includes a top electrode connected to a sinusoidal radio frequency (RF) generator to receive a sinusoidal signal and a non-sine radio frequency (RF) generator to generate a nonsinusoidal signal. Includes. The system further includes a power amplifier connected to the non-signaled radio frequency (RF) generator. The power amplifier amplifies the nonsinusoidal signal to produce an amplified signal. The system further includes a filter connected to the power amplifier. The filter generates a filtered signal by filtering the amplified non-sinusoidal signal using a filtering signal. The system includes a chuck connected to the filter. The chuck faces at least a portion of the upper electrode, and the chuck includes a lower electrode. The lower electrode is used to receive the filtered signal so that an ion energy in the chuck that exists between a lower threshold and an upper threshold is achieved. |
| priorityDate | 2013-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.