http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102215333-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102215333-B1 |
| titleOfInvention | Resist underlayer composition, and method of forming patterns using the composition |
| abstract | A composition for a resist underlayer film comprising a moiety represented by the following Formula 1 or a polymer including a moiety represented by the following Formula 2, and a solvent, and a pattern formation method using the composition for a resist underlayer film are provided. [Formula 1] [Formula 2] The definitions of Formula 1 and Formula 2 are as described in the specification. |
| priorityDate | 2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 66.