http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102188525-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4b5184b7a8fe02a0c2cc4e509230214 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-348 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-32 |
| filingDate | 2019-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fb3bc8e1fad35447ccfeb315c1e7b49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a9e8b5f5a73ea8268f06ad1cee21891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3373d43c6523c788d458c8df5f998873 |
| publicationDate | 2020-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102188525-B1 |
| titleOfInvention | Polishing pad, preparation method thereof, and preparation method of semiconductor device using same |
| abstract | The embodiment relates to a polishing pad used in a chemical mechanical planarization (CMP) process of a semiconductor, a method of manufacturing the same, and a method of manufacturing a semiconductor device using the same. In the polishing pad according to the embodiment, the size (diameter) and distribution of a plurality of pores are adjusted, so that the total area of pores per unit area and pore distribution including D q , D sk and D ku of Equations 1 to 3 of the present specification When the parameter satisfies a specific range, polishing performance such as polishing rate and flatness can be further improved. |
| priorityDate | 2019-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.