http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102171476-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4488 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate | 2018-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102171476-B1 |
| titleOfInvention | Multilayer system of initiated chemical vapor deposition using initiators and the method thereof |
| abstract | The multilayer system of Initiated Chemical Vapor Deposition (iCVD) using an initiator according to the present invention includes a plurality of chambers capable of accommodating a substrate therein; A plurality of monomer injection units for injecting a monomer into each of the plurality of chambers; A plurality of initiator injection units for injecting an initiator into each of the plurality of chambers; It may include a plurality of temperature control units for controlling the temperature of each of the plurality of chambers to form a thin film on the substrate using the monomer and the initiator. |
| priorityDate | 2017-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.