http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102144000-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
filingDate | 2019-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2020-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2020-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102144000-B1 |
titleOfInvention | Etchant composition, method of forming a transparent electrode and method of manufacturing a display substrate using the same |
abstract | Etching composition, nitric acid 3% by weight or more and less than 10% by weight, chlorinated compound 0.01% by weight or more and 5% by weight or less, ammonium compound 0.1% by weight or more and 5% by weight or less, cyclic amine compound 0.1% by weight or more and 5% by weight or less and excess Contains water. Accordingly, the metal oxide layer may be selectively etched to prevent etching of the metal layer including copper, titanium, molybdenum, or aluminum. |
priorityDate | 2019-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.