http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102090547-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-093 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-182 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-09 |
| filingDate | 2013-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102090547-B1 |
| titleOfInvention | Composition for forming liquid immersion upper layer film, process for forming resist pattern, polymer and compound |
| abstract | An object of the present invention is to provide a composition for forming an immersion upper layer film that exhibits high water repellency and excellent peel resistance. The solution of the present invention is a composition for forming a liquid immersion upper layer film containing [A] a polymer component comprising a polymer (a) having a structural unit (I) represented by the following formula (1), and [B] a solvent. . In the following formula (1), R 1 is a carboxy group or a group represented by the following formula (2). X is a single bond, a C 1 to C 20 divalent hydrocarbon group, or a C 1 to C 20 divalent fluorinated hydrocarbon group. R 2 is a (n + 1) valent hydrocarbon group having 1 to 20 carbon atoms, a (n + 1) valent fluorinated hydrocarbon group having 1 to 20 carbon atoms, or -CO-, -COO-, or between carbon-carbons of these groups. It is a group containing at least one member selected from the group consisting of O-, -NR'-, -CS-, -S-, -SO- and -SO 2- . R 3 is a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. |
| priorityDate | 2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 182.