| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-1931
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-1951
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2014-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102089813-B1 |
| titleOfInvention |
Controlling temperature of a faraday shield |
| abstract |
A method for controlling thermal cycling of a faraday shield in a plasma process chamber is disclosed. The method comprises performing a first plasma processing operation on a first wafer in a plasma process chamber; Terminating the first plasma processing operation; Performing a first wafer transfer operation for transferring the first wafer to the outside of the chamber; And during the first wafer transfer operation, applying power to the TCP coil under plasma constrained conditions. |
| priorityDate |
2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |