http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102077101-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-70 |
| filingDate | 2013-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102077101-B1 |
| titleOfInvention | Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable base |
| abstract | This invention is a photoresist composition containing the polymer which has a structural unit containing an acid dissociable group, and the compound represented by following General formula (1). In formula (1), R 1 is a hydrogen atom or a monovalent acid dissociable group. R < 2> is a C3-C20 (m + 1) valent alicyclic hydrocarbon group. m is an integer of 2-5. R 3 and R 4 each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms, or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms. n is an integer of 0-5. To which at least two of the plurality of R 1 bonded to each other, may form a ring structure together with the carbon atom of the R 2 that bind to a plurality of oxygen atoms, and these oxygen atoms bonded to R 1. M + is a monovalent radiation decomposable onium cation. |
| priorityDate | 2012-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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