| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2016-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101913228-B1 |
| titleOfInvention |
Barrier chemical mechanical planarization slurries using ceria-coated silica abrasives |
| abstract |
A chemical mechanical planarization (CMP) polishing composition comprising composite particles, such as ceria coated silica particles, provides adjustable abrasion selectivity values between different films. The composition allows a high removal rate for interconnect metal and silicon oxide dielectrics while providing a polish stop on low-K dielectrics, a-Si and tungsten films. The chemical mechanical planarization (CMP) polishing composition exhibited excellent performance using a soft polishing pad. |
| priorityDate |
2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |