| abstract |
(A) at least one type of abrasive particles that are positively charged when dispersed in an aqueous medium having a pH in the range of 3-9 indicated by electrophoretic mobility; (B) (B1) Aliphatic and cycloaliphatic hydroxy groups having at least two carbon atoms, at least one hydroxy group, and at least one carboxylic acid group in the molecule, wherein the molar ratio of hydroxyl groups to the carboxylic acid group is 1 or more. carboxylic acid; (B2) a hydroxycarboxylic acid (b1) ester having at least one group selected from the group consisting of a lactone group, an esterified hydroxy group, an esterified carboxylic acid group, and a mixture thereof (however, one or more hydroxy groups) Is present in (b2)); and (b3) mixtures thereof; One or more water-soluble and water-dispersible hydroxy groups containing a component selected from the group consisting of: And (C) (C1) linear and branched alkylene oxide homopolymers and copolymers; (C2) linear and branched, aliphatic and alicyclic poly (N-vinylamide) homopolymers and copolymers; (C3) a cationic polymer flocculant having a weight average molecular weight of less than 100,000 daltons; At least one water-soluble and water-dispersible polymer component selected from the group consisting of: A water-based abrasive composition comprising: Furthermore, a method for polishing substrate materials for electrical, mechanical and optical devices. |