| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02172 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101891381-B1 |
| titleOfInvention |
Articles coated with fluoro-annealed films |
| abstract |
The present invention relates to a coating having excellent plasma etch-resistance and provides an article and a method capable of extending the lifetime of the RIE component. The article comprises a vacuum compatible substrate and a protective film covering at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium. |
| priorityDate |
2015-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |