http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101866254-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2011-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101866254-B1 |
| titleOfInvention | Method of preventing oxidation of metal film surface and solution of preventing oxidation |
| abstract | An oxidation preventing method and an oxidation preventing solution for suppressing or preventing corrosion (erosion) caused by oxidation of a surface of a metal film in a semiconductor substrate. Further, the corrosion of the metal film or the insulating layer due to the application of the antioxidant solution is suppressed, and the influence of water applied in a large amount in the dicing step is reduced particularly by utilizing the antioxidant effect, And an antioxidant. Wherein the surface of the metal film of the semiconductor substrate is treated with an antioxidant solution, wherein the antioxidant solution contains at least a phosphorus-containing compound and a basic compound in water to adjust the pH to 6 to 10, Way. |
| priorityDate | 2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 181.