http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101850356-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101850356-B1 |
| titleOfInvention | Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid |
| abstract | An imidazolium halide having an alkyl group having a carbon number of 12, a carbon number of 14 or a carbon number of 16, a pyridinium halide having an alkyl group having a carbon number of 14 or a carbon number of 16, and an ammonium halide having an alkyl group having a carbon number of 16 or 18, Is a treatment liquid for inhibiting the pattern collapse of the microstructure. Further, it is a method for producing a microstructure composed of silicon oxide using the treatment liquid. |
| priorityDate | 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 129.