| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2301-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67132 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J4-02 |
| filingDate |
2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101682720-B1 |
| titleOfInvention |
Semiconductor wafer processing method |
| abstract |
The present invention relates to a pressure-sensitive adhesive sheet, a method for producing the pressure-sensitive adhesive sheet, and a semiconductor wafer processing method. The pressure-sensitive adhesive sheet of the present invention has a substrate which is a cured product of a photocurable composition comprising a monomer represented by a specific formula. In the present invention, it is possible to provide a pressure-sensitive adhesive sheet capable of preventing the occurrence of deformation such as warpage or cracking due to the processing process of the semiconductor wafer or the residual stress before and after processing, while forming the base sheet in a single layer structure. |
| priorityDate |
2010-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |