| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2009-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101593540-B1 |
| titleOfInvention |
High density helicon plasma source for wide ribbon ion beam generation |
| abstract |
Discloses an ion source capable of generating a dense, wide ribbon ion beam using one or more helicon plasma sources. In addition to the helicon plasma source (s), the ion source also includes a diffusion chamber. The diffusion chamber has an extraction opening oriented along the same axis as the dielectric cylinder of the helicon plasma source. In one embodiment, dual helicon plasma sources located on opposite ends of the diffusion chamber are used to generate a more uniform extracted ion beam. In yet another embodiment, a multicusp magnetic field is used to further enhance the uniformity of the extracted ion beam. |
| priorityDate |
2008-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |