http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101559816-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2013-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101559816-B1 |
| titleOfInvention | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium |
| abstract | The present invention forms a thin film containing a predetermined element such as a silicon film in a low temperature region. Forming a first layer containing the predetermined element and the halogen group by supplying a first raw material containing a predetermined element including a semiconductor element or a metal element and a halogen group to the substrate; And a second raw material containing the predetermined element and the amino group on the substrate and having a number of ligands containing an amino group in one molecule of not more than 2 and not more than the number of ligands containing a halogen group in one molecule of the first raw material, And a step of forming a second layer composed of the predetermined element by modifying the first layer by supplying the predetermined element group to the substrate, Is formed. |
| priorityDate | 2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.