http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101457715-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2007-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101457715-B1 |
| titleOfInvention | A method of forming a low-dielectric-constant amorphous silica-based coating film, and a method of forming a low- |
| abstract | The present invention relates to a method for stably forming a low-dielectric-constant amorphous silica-based coating film having a relative dielectric constant of 3.0 or less and a film modulus of 3.0 GPa or more with a Young's modulus of elasticity of 3.0 GPa or more on a substrate, comprising: (a) a tetraalkylammonium hydroxide (B) a step of holding the substrate in an apparatus, and a step of forming a coating film on the substrate at a temperature of 25 to 340 占 폚 (C) introducing superheated steam into the apparatus and heating the film under a temperature condition of 105 to 450 DEG C to heat the substrate; and (d) introducing nitrogen gas into the apparatus, And firing the coating film under a temperature condition of 350 to 450 캜.n n n n Silica-based coating film, low permittivity |
| priorityDate | 2006-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 98.