http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101406765-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101406765-B1 |
| titleOfInvention | Slurry for chemical mechanical polishing and manufacturing method thereof |
| abstract | A slurry for chemical mechanical polishing and a method of manufacturing the same are disclosed. A method for producing a slurry for chemical mechanical polishing comprises: preparing a slurry preparation mixture by mixing abrasive particles, a solvent and a dispersant; Milling the slurry preparation mixture; Filtering the mixture for making the milled slurry; Immersing the filtered slurry preparation mixture in an aging vessel and aging the slurry preparation mixture; And rotating the aging vessel. |
| priorityDate | 2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.