http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101402147-B1

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66462
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-778
filingDate 2014-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c74b3ddca7764ae5d1efc2a59b360c15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c48b366d2ab9ee26f0d9b04296372ee8
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publicationDate 2014-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101402147-B1
titleOfInvention Gallium nitride-based semiconductor device, manufacturing method thereof, and power module including the same
abstract A gallium nitride based semiconductor device according to the present invention includes: a source ohmic layer and a drain ohmic layer formed on a first surface of a substrate; A gate electrode formed on the first surface of the substrate between the source ohmic layer and the drain ohmic layer; A source electrode and a drain electrode connected to the source ohmic layer and the drain ohmic layer, respectively; A source pad and a drain pad formed on the source electrode and the drain electrode, respectively; And a source ground electrode conformally formed on a sidewall of the substrate from a side wall of the source pad and extending to a second side of the substrate, wherein the source electrode vertically overlaps the gate electrode. The present invention also provides a power module including the gallium nitride-based semiconductor device.
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priorityDate 2014-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 29.