| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd95742c20372654eee4ec0a64eba4c9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2013-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d14d91df0d15015c6334cdba7b759ee0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d492c050786a5d1c0b84683bf24d624f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56dc49dbc246692a10ddddab4f22e2b7 |
| publicationDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101384810-B1 |
| titleOfInvention |
Thinner composition for photoresist rinse and purification method thereof |
| abstract |
The present invention relates to a thinner composition for photoresist rinsing and a method for purifying the same, and more specifically, to a conventional thinner thinner, which can be replaced with a thinner of a mixed solvent, at the same time high yield and convenience of work process at the time of regeneration. The present invention relates to a thinner composition and a method for purifying the same, which can be improved to maximize economics and convenience in an industrial aspect. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101501097-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020017780-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102109403-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020017779-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101939811-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108299203-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101967224-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102156903-B1 |
| priorityDate |
2013-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |