| abstract |
(57) [Summary] (Modified) [Purpose] Low flammability, low toxicity, low swelling, and high lipophilicity, which are preferably used when developing a radiation-sensitive composition. Easy to recycle developer with high developing power and high resolution, A developing device using the developer, a method for recycling the developer, and a pattern forming method using the developer are provided. [Structure] A developer for a radiation-sensitive resin composition which is an emulsion containing water and a solvent, a step of separating the developer into oil and water, a step of purifying each layer, and a step of mixing each layer again to a predetermined concentration. Or a step of aggregating a mixed vapor of a solvent and water generated from the developer and a step of adding a predetermined amount of a surfactant as necessary, or by heating or cooling the developer. A step of forming a uniform layer into which the main component of the radiation-sensitive resin composition is deposited, a step of removing the main component of the radiation-sensitive resin composition deposited from the uniform layer, and a concentration of the components so that the uniform layer has a predetermined concentration again. And a step of adjusting. |