http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101335388-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5808dcff5c12f0317af33e693021c16 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C317-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D333-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2012-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b07c820d82a855b6cbc33bda7b292d5 |
| publicationDate | 2013-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101335388-B1 |
| titleOfInvention | Novel sulfonic acid salts, acid generators and resist compositions containing acid generators using the same |
| abstract | The present invention is an acid generator for generating a strong acid represented by the following formula (1) or (2) in response to heat or ultraviolet rays, far ultraviolet rays, KrF excimer laser, ArF excimer laser, electron beam, EUV, X-rays, gamma rays and synchrotron radiation and It relates to a resist composition comprising sulfonic acid salts and photoacid generators which are materials used for synthesis. (Formula 1) (2) In the above formula, R 1 is a hydrogen, vinyl, allyl, aryl or ether group having 1 to 20 carbon atoms, ester group, alkenyl group, aryl group or straight chain, branched or cyclic alkyl group with or without a ketone functional group R2 is a hydrogen atom, a vinyl group, an allyl group, an aryl group, a lactone group or an ether group having 1 to 30 carbon atoms, ester group, alkenyl group, aryl group, sulfide group, ketone group or halogen containing or not containing A linear, branched or cyclic alkyl group, R 3 is a straight, branched or cyclic alkylene group with or without ether, ester, alkenyl, aryl, sulfide, ketone or halogen group having 1 to 20 carbon atoms , Alkenyl group or arylene group, R4 represents a trivalent alkyl group or a lactone group, with or without ether, ester, alkenyl, aryl or ketone group having 4 to 20 carbon atoms . [ 1 H-NMR / CDCl 3 ] |
| priorityDate | 2012-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.