| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2009-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101309716-B1 |
| titleOfInvention |
Plasma Resistant Coatings for Plasma Chamber Parts |
| abstract |
Plasma resistant coating materials, plasma resistant coatings and methods of forming such coatings in hardware components are provided. In one embodiment, the hardware component is an electrostatic chuck (ESC) and the plasma resistant coating is formed on the ESC surface. Plasma resistant coatings are formed by methods other than thermal spraying to provide plasma resistant coatings with advantageous material properties. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102522277-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190063040-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102080153-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230057124-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180080429-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230102468-A |
| priorityDate |
2008-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |